3D-Volumenstrukturierung

Leistungsangebot 3D-Volumenstrukturierung

Mikrostrukturierung

  • Selektives laserinduziertes Ätzen von 3D-Bauteilen aus Glas und Saphir
  • 3D-Mikrostrukturen mittels Multiphotonenpolymerisation
  • Mikrokanäle und Mikroschnitte in transparenten Materialien
  • Nanostrukturen durch laserinduzierte Nanooptik

Modifikationen im Volumen

  • Rissfreie Innenmarkierungen
  • Farbige Innenmarkierungen durch Interferenz an Gittern
  • Wellenleiter in Gläsern und Kristallen für Strahlformung und Wellenleiterlaser

Systemtechnik für die Strukturierung im Volumen

  • Mikroscanner für die Bearbeitung im Volumen mit Mikrometerfokus

Ultrakurzpulsbearbeitung

  • Laserstrahlabtragen und Laserstrahlbohren

Publikationen

Pütsch, O., Temmler, A., Stollenwerk, J., Willenborg, E., Loosen, P.:
Active optical system for advanced 3D surface structuring by laser remelting
Proceedings of SPIE 9356 (10 S.) (2015)

Jauer, L., Leonards, H.:
3D-Druck und Biofabrikation
RWTH-Themen (1), 42-45 (2014)

Gottmann, J., Hermans, M., Ortmann, J.:
Microcutting and hollow 3D microstructures in glasses by In-volume Selective Laser-induced Etiching (ISLE)

J. Laser Micro/Nanoneng. 8 (1), 15-18 (2013)

Schaefer, D., Gottmann, J., Hermans, M., Ortmann, J., Kelbassa, I.:
High speed micro scanner for 3D in-volume laser micro-processing
Laser-based Micro- and Nanopackaging and Assembly VII.
Proc. SPIE 8608, 6 S.
(2013)

Schaefer, D., Schnitzler, D., Kelbassa, I.:
Fundamental processes of refractive index modifications during femtosecond laser waveguide writing
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, Proc. SPIE 8613, X1-7
(2013)

Beckmann, D., Esser, D., Gottmann, J.:
Characterization of channel waveguides in Pr:YLiF4 crystals fabricated by direct femtosecond laser writing.
Appl. Phys. B – Lasers Optics, Online first, 6 S., DOI: 10.1007/s00340-011-4406-6, 2011

Beckmann, D., Schnitzler, D., Schaefer, D., Gottmann, J., Kelbassa, I.
Beam shaping of laser diode radiation by waveguides with arbitrary cladding geometry written with fs-laser radiation.
Opt. Expr. 19, Nr 25, 25418-25425, 2011

Esser, D., Rezaei, S.,Li, J., Herman, P. R., Gottmann, J.:
Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses.
Opt. Expr. 19, Nr. 25, 25632-25642, 2011

Hoerstmann-Jungemann, M., Dobrzanski, D., Schaefer, D., Kelbassa, I.:
Functionalization of sapphire surfaces using fs-laser radiation and selective etching.
ICALEO. 30. Int. Congr. on Applications of Lasers and Electro-Optics, October 23-27, 2011. M 1203, 1105-1110, 2011

Schaefer, D., Beckmann, D., Hoerstmann-Jungemann, M., Kelbassa, I.
Waveguides and markings inside transparent materials by fs-laser radiation.
ICALEO 30. Int. Congr. on Applications of Lasers and Electro-Optics, October 23-27, 2011. M1004,5 S., 2011

Schaeffer, R. D., Schaefer, D.:
New method for structuring brittle materials.
Micromanufacturing 4, Nr. 4, 14-15, 2011

Gottmann, J.
Selektives Laserätzen von Glas und Saphir
Mikroproduktion 2010, Nr 6, 10-13
2010

Hörstmann-Jungemann, M., Gottmann, J., Keggenhoff, M.
3D-Microstructuring of sapphire using fs-laser irradiation and selective etching
J. Laser Micro/Nanoeng. 5, 145-149
2010

J. Gottmann, D. Wortmann, M. Hörstmann-Jungemann
Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching
Appl. Surf. Sci.
255, 5641-5646, 2009

J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, D. Beckmann
High speed and high precision Fs-laser writing using a scanner with large numerical aperture
J. Laser Micro/Nanoeng.
4, Nr 3, 192-196, 2009

D. Esser, D. Wortmann, J. Gottmann
In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass
Proc. SPIE
7205, 7205101-7205109, 2009

M. Waldmann, R. Caspary, D. Wortmann, J. Gottmann, W. Kowalsky
Erbium-doped fluoride glass waveguides
Electron. Lett.
44, Nr 20, 1193-1194, 2008

D. Wortmann, J. Gottmann
Fs-Laser structuring of ridge waveguides
Appl. Phys. A
93, 197-201, 2008

R. Poprawe, A. Gillner, D. Hoffmann, J. Gottmann, W. Wawers, W. Schulz
High speed high precision ablation from ms to fs
Proc. SPIE
7005, 12 S., 2008

J. Gottmann, D. Wortmann, N. Brandt
Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing
Proc. SPIE
6879, 12 S. 2008

M. Hörstmann-Jungemann, J. Gottmann ,D. Wortmann,
Time resolved measurement of the dielectric function during direct fs-laser writing of SiO2 and sapphire
Proc. LPM2008 - 9th Int. Symposium on Laser Precision Microfabrication
5 S., 2008

D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle
Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching
Opt. Expr.
16, Nr 3, 1517-1522, 2008

J. Gottmann, L. Moiseev, D. Wortmann, I. Vasilief, L. Starovoytova, D. Ganser, R. Wagner
Laser deposition and laser structuring of laser active planar waveguides of Er:ZBLAN, Nd:YAG and Nd:GGG for integrated waveguide lasers
Proc. SPIE
6459, 10 S., 2007

J. Gottmann, D. Wortmann, I. Vasilief, L. Moiseev, D. Ganser
Manufacturing of Nd:Gd3Ga5O12 ridge waveguide lasers by pulsed laser deposition and ultrafast laser micromachining
Appl. Surf. Sci.
254, 1105-1110, 2007

D. Wortmann, M. Ramme, J. Gottmann
Refractive index modification using fs-laser double pulses
Opt. Expr.
15, 10149-10153, 2007

R. Wagner, J. Gottmann
Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation
8th International Conference on Laser Ablation
J. Phys.: Conference Series
59, 333-337, 2007

D. Wortmann, L. Moiseev, I. Vasilief, D. Ganser,L. Starovoytova, J. Gottmann
Waveguide lasers of Er:ZBLAN and Nd:GGG by pulsed laser deposition and fs-laser microstructuring
Proc. 4th Int. WLT-Conf. on Lasers in Manufacturing 2007, Munich, June
821-826, 2007

R. Wagner, J. Gottmann, A. Horn, E. W. Kreutz
Subwavelength ripple formation induced by tightly focused femtosecond laser radiation
Applied Surface Science 252
8576-8579, 2006