Ultrakurzpulsbearbeitung

Fraunhofer-Institut für Lasertechnik ILT

Leistungsangebot Ultrakurzpulsbearbeitung

Laserstrahlabtragen

  • Schmelzarme Ablation einer Vielzahl von Materialien (Metalle, Keramiken, Gläser, Verbundstoffe) mit hoher Präzision
  • Herstellung von Werkzeugen und Werkzeugeinsätzen
  • Herstellung funktionaler Oberflächen zur Änderung der Benetzbarkeit, des Reibverhaltens und optischer Eigenschaften
  • Strukturgrößen < 1 μm bei Oberflächengenauigkeiten < 200 nm

Laserstrahlbohren

  • Präzisionsbohren mit Durchmessern > 30 μm bei Bohrtiefen bis zu 2 mm
  • Mikrobohren mit Bohrdurchmessern < 1 µm

3D-Volumenstrukturierung

  • Herstellung von Wellenleitern in transparenten Materialien
  • Mikrostrukturierung durch selektives Ätzen

Multiphotonenpolymerisation

  • Herstellung von dreidimensionalen Polymermikrostrukturen mit lateralen Auflösungen < 1 µm

Verfügbare Lasersysteme

  • Pikosekundenlaser (λ = 355 nm, 532 nm, 1064 nm) bis P = 50 W,τ = 10-15 ps
  • Femtosekundenlaser (λ = 470- 2700 nm) bis P = 1,5 W, τ =100 fs und (λ = 1030 nm) bis P = 150 W, τ = 700 fs - 10 ps

Publikationen

Kelbassa, I., Wortmann, D., Mans, T., Gottmann, J., Russbueldt, P., Weitenberg, J., Brajdic, M., Hermans, M., Beckmann, D., Poprawe, R.
High-power ultra-short pulse laser radiation: New sources as key enablers for emerging applications
Pacific International Conference on Applications of Lasers and Optics (PICALO), Shangri-La Hotel, Wuhan, China, March 23-25, 2010. (6 S.)
2010

D. Esser, D. Mahlmann, D. Wortmann, J. Gottmann
Interference microscopy of femtosecond laser written waveguides in phosphate glass
Appl. Phys. B - Lasers and Optics
96, Nr 2-3, 5 S. 2009

I. Mingareev, A. Horn
Melt dynamics of aluminium irradiated with ultrafast laser radiation at large intensities
J. Appl. Phys.
106, 13513 (7 S.), 2009

D. Wortmann, I. Mingareev, A. Brand, A. Horn
Micro-welding of glass by fs-laser irradiation and process observation using fs-pump-probe white light interference microscopy
Conference on Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009, Munich, 14-19 June 2009
Mulhouse: European Physical Society
CM2.2 THU, (1 S.), 2009

A. Horn, I. Mingareev, J. Gottmann, A. Werth, U. Brenk
Dynamical detection of optical phase changes during micro-welding of glass with ultra-short laser radiation
Meas. Sci. Technol
19, 1-6, 2008

J. Gottmann, D. Wortmann, M. Hörstmann-Jungemann
Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching
Appl. Surf. Sci.
doi. 10.1016/j.apsusc.2008.10.097 (Online), 2008

D. Wortmann, J. Gottmann
Fs-Laser structuring of ridge waveguides
Appl. Phys. A
93, 197-201, 2008

D. Ganser, L. Starovoytova, D. Wortmann, J. Gottmann, I. Vasilief, L. Moiseev
Growth of Nd:Gd3Ga5O12 thin films by pulsed laser deposition for planar waveguide laser
J. Laser Micro/Nanoeng.
3, 19-23, 2008

R. Poprawe, A. Gillner, D. Hoffmann, J. Gottmann, W. Wawers, W. Schulz
High speed high precision ablation from ms to fs
Proc. SPIE
7005, 12 S., 2008

A. Horn, I. Mingareev, A. Werth, M. Kachel, U. Brenk
Investigations on ultrafast welding of glass-glass and glass-silicon
Appl. Phys. A
93, 171-175, 2008

A. Horn, I. Mingareev, A. Werth, M. Kachel
Joining of thin glass with semiconductors by ultra-fast high-repetition laser welding
Proc. SPIE
6880, 6 S., 2008

J. Gottmann, L. Moiseev, I. Vasilief, D. Wortmann
Manufacturing of Er:ZBLAN ridge waveguides by pulsed laser deposition and ultrafast laser micromachining for green integrated lasers
Mat. Sci. Eng. B
146, 245-251, 2008

J. Gottmann, D. Wortmann, R. Wagner
Manufacturing of periodical nanostructures by fs-laser direct writing
Proc. SPIE
7022, 702202-1-702202-10, 2008

D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle
Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching
Opt. Expr.
16, Nr 3, 1517-1522, 2008

A. Horn, I. Mingareev, A. Werth, M. Kachel, U. Brenk
Non-interferometric transient quantitative phase microscopy for ultrafast engineering
Appl. Phys. A
93, 165-169, 2008

I. Mingareev, A. Horn
Time-resolved investigations of plasma and melt efections in metals by pump-probe shadowgraphy
Appl. Phys. A
92, 917-920, 2008

M. Hörstmann-Jungemann, J. Gottmann ,D. Wortmann,
Time resolved measurement of the dielectric function during direct fs-laser writing of SiO2 and sapphire
Proc. LPM2008 - 9th Int. Symposium on Laser Precision Microfabrication
5 S., 2008

I. Miyamoto, A. Horn, J. Gottmann, D. Wortmann, F. Yoshino
Fusion Welding of Glass Using Femtosecond Laser Pulses with High-repetition Rates
J. Laser Micro/Nanoeng.
2, 57-63, 2007

I. Miyamoto, A. Horn, J. Gottmann
Local Melting of Glass Material and Its Application to Direct Fusion Welding by Ps-laser Pulses
J. Lasermicro/Nanoeng.
2, 7-14, 2007