Nanostrukturierung

Leistungsangebot Nanostrukturierung

  • Herstellung von deterministischen periodischen Oberflächenstrukturen durch Mehrstrahl-Interferenz
  • Herstellung von statistischen periodischen Oberflächenstrukturen mittels laserinduzierten Oberflächeneffekten (LIPSS, nano ripples)
  • Strukturgrößen im Bereich von 100 nm - 500 nm

Publikationen

Großmann, D., Reininghaus, M., Kalupka, C., Jenne, M., Kumkar, M.:
In-situ microscopy of front and rear side ablation processes in alkali aluminosilicate glass using ultra short pulsed laser radiation.
OPTICS EXPRESS 25 (23), 28478- (11 S.) (2017)

Boehr, S., Nolis, P., Brenner, A., Reininghaus, M., Lamß, M., Müller, B.:
Laserbasierte Fertigungstechniken und additive Fertigung.
Galvanotechnik 108, 1672-1677, (6 S.) (2017)

Steger, M., Gillner, A.:
Analysis and Evaluation of Boundary Conditions for Direct Surface Structuring by Multi-Beam Interference.
JOURNAL OF LASER MICRO/NANOENGINEERING 11, 296-303, (2016)

Reininghaus, M., Ivanov, D., Maß, T.W.W., Eckert, S., Juschkin, L., Garcia, M. E., Taubner, T., Poprawe, R.:
Nanophotonic applications of fs-laser radiation induced nanostructures and their theoretical description
Optically Induced Nanostructures. Hrsg. v. König, Karsten / Ostendorf, Andreas. Berlin: De Gruyter, 25-46, (2015)

Steger, M., Hartmann, C., Beckemper, S., Holtkamp, J., Gillner, A.:
Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
Proc. of LAMP2013 - the 6th International Congress on Laser Advanced Materials Processing, (6 S.) (2013)

Freiberger, R., Hauck, J., Reininghaus, M., Wortmann, D., Juschkin, L.:
Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation. 
Proc. SPIE 8076, 80760K, (7 S.) (2011)

Ivanov, D. S. , Shultz (Schulz), W.:
MD-based modeling of swift heavy ion beam nanostructuring of dielectrics. 
8th EBSA European Biophysics Congress, August 23rd-27th 2011, Budapest, Hungary. Eur. Biophys. J. 40 (1), P-266, p.107, (2011)

Huang, J., Beckemper, S., Gillner, A., Wang, K.:
Tunable surface texturing by polarization-controlled three-beam interference
J. Micromech. Microeng. 20, 95004, (6 S.) (2010)

Gottmann, J., Wortmann, D., Brandt, N.:
Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing
Proc. SPIE 6879, (12 S.) (2008)

Wortmann, D., Gottmann, J., Brandt, N., Horn-Solle, H.:
Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching
Opt. Expr.16 (3), 1517-1522, (2008)