Conference  /  October 21, 2023  -  October 25, 2023

2023 Source Workshop

Event in cooperation with EUV Litho, Inc., EUV - IUCC and RWTH Aachen University

This year, the workshop will be held in Aachen, Germany, co-organized with RWTH Aachen University,  EUV Litho, Inc. and EUV - IUCC. Our annual Source Workshop focuses on the latest scientific and technical developments related to extreme ultraviolet (EUV) and soft to hard X-ray sources. The workshop will provide a forum for researchers, suppliers and endusers in the EUV and X-ray light source area to present their work and discuss a wide range of potential applications.