Thin Film Processing

Thin films are used for electronic applications, for wear and corrosion protection as well as for optical and structural applications. The functionalization of these layers by means of laser radiation enable the realization of ressource- and energy efficient production processes with minimal thermal load for the workpiece. The local selectivity as well as the inline-capabilty open new possibilities for the layout of new products and production processes.

Our service portfolio includes feasibility studies for customer-specific problems, integration of laser functionalization into the production process as well as consulting for the concept of processes and production lines.

Funtional Layers for Electronic Applications

• Selective gold-contacting
• Multi-material layers for component-connected sensors and actors
• Electrodes for Li-Ion batteries

Wear-/Corrosion Protection and Tribology

• Nano-ceramic layers
• Polymer layers
• Bonded coatings

Optical and structural Applications

• Anti-reflection coatings
• Carbon-fiber production

Dahmen, M.:
Laserbasierte Funktionalisierung von partikulären Polyetheretherketon-Beschichtungen auf Aluminiumsubstraten mittels Zwei-Strahl-Ansatz.
Dissertation RWTH Aachen University, 2023, Apprimus Verlag, Aachen, (2023)
http://doi.org/10.18154/RWTH-2023-11484 (Open Access)

Mertin, J.:
Laserbasierte Herstellung von Kupferschichten auf Aluminium-Oxid-Keramiken für Anwendungen in der Leistungselektronik.
Dissertation, RWTH Aachen University, 2023, Shaker Verlag, Düren, (2023)
http://doi.org/10.18154/RWTH-2023-09878 (Open Access)

Fink, S., Demir, D., Börner, M., Göken, V.,  Vedder, C.:
High-Speed Laser Drying of Lithium-Ion Battery Anodes: Challenges and Opportunities.
World Electric Vehicle Journal 14(9), 255- (2023)
https://doi.org/10.3390/wevj14090255 (Open Access)

Frühling, J, Schreyer, S., Fink, S, Vedder, C.:
Laser-based crystallization of oxide ceramic thin films for Solid Oxide Fuel Cells.
WLT/LiM Lasers in Manufacturing Conference 2023. 26. – 29. Juni 2023, München Germany.
Proceedings of World of Photonics, (5 S.), (2023)

Fink, S., Dahmen L., Vedder, C., Stollenwerk, J.:
Laser-based, direct formation of thin copper-nickel alloy films with low thermal coefficient of resistivity.
JOURNAL OF APPLIED PHYSICS 132(20), 205301- (2022)
https://doi.org/10.1063/5.0124000 (Open Access)

Scheld, W., Lobe, S., Uhlenbruck, S., Dellen, C., Sohn, Y., Hoff, L., Vondahlen, F., Guillon, O., Fattakhova-Rohlfing, D.:
Rapid thermal sintering of screen-printed LiCoO2 films.
THIN SOLID FILMS 749, 139177- (2022)
http://dx.doi.org/10.1016/j.tsf.2022.139177

Fink, S., Lübben, J., Schneller, T., Vedder, C., Böttger, U.:
Impact of the processing temperature on the laser-based crystallization of chemical solution deposited lead zirconate titanate thin films on short timescales.
JOURNAL OF APPLIED PHYSICS 131(12), 125302- (9 S.) (2022)
https://doi.org/10.1016/10.1063/5.0084953 (Open Access)

Dahmen, M., Vedder, C., Baek, S., Stollenwerk, J.:
Dual-beam Laser-based Processing of Tribological Polymer Coatings.
12th CIRP Conference on Photonic Technologies [LANE 2022], 4-8 September 2022, Fürth, Germany - (2022)

Hoff, L.C., Scheld, W.S., Vedder, C., Stollenwerk, J.:
Laser sintering of ceramic-based solid-state battery materials.
SPIE Photonics West 2022 On Demand - (2022)
https://doi.org/10.1117/12.2607752

Hoff, L.C., Scheld, W.S., Vedder, C., Stollenwerk, J., Lobe, S., Uhlenbruck, S.:
Laser sintering of ceramic-based solid-state battery materials.
WLT/Lasers in Manufacturing Conference 2021, International Congress Center, Munich, Germany. Proceedings of World of Photonics, (7 S.), (2021)

Fuchs, F., Vedder, V., Stollenwerk, J., Loosen, P.:
Determination of the temperature dependent optical properties of amorphous silicon thin films at elevated temperatures.
OPTICS EXPRESS 29, 41356-41362 (2021)
https://doi.org/10.1364/OE.437507

Rehberger, M., Noll, M.:
DMS-Sensoren aus dem 3D-Druck mit Low-Power-Funk-Telemetrie.
Elektronik-Praxis 17, 46-48 (2020)

Rehberger, M., Vedder, C., Schleifenbaum, J.H.:
Challenges and Opportunities for Laser-based Additive Manufacturing of Strain Sensors.
WLT/LiM Lasers in Manufacturing Conference 2019 Munich, June 24 - 27, 2019. Proceedings of World of Photonics, (8 S.) (2019)

Völl, A., Wollgarten, S., Stollenwerk, J., Loosen, P.:
Application specific intensity distributions for laser functionalization of (nano-)ceramic coatings as wear protection.
WLT/LiM Lasers in Manufacturing Conference 2017. Munich, June 26-29 2017. Proceedings of World of Photonics, (8 S.), (2017)

Sändker, H., Stollenwerk, J., Loosen, P.:
Laser-based process for polymeric tribological coatings on lightweight components.
SURFACE & COATINGS TECHNOLOGY 332, 391-398 (2017)
http://dx.doi.org/10.1016/j.surfcoat.2017.06.075

Opitz, M., Go, D., Lott, P., Müller,S., Stollenwerk, J., Kuehne, A., Roling, B.:
On the interplay of morphology and electronic conductivity of rotationally
spun carbon fiber mats.
JOURNAL OF APPLIED PHYSICS 122, 105104- (2017)
http://dx.doi.org/10.1063/1.5001509

Sändker, H., Stollenwerk, J., Loosen, P.:
Laser-based Process for Polymeric Coatings on Temperature-Sensitive Metallic Components.
WLT/LiM Lasers in Manufacturing Conference 2017. Munich, June 26-29 2017. Proceedings of World of Photonics, (6 S.) 1-6 (2017)

Bilandžić, M. , Wollgarten, S. , Stollenwerk, J. , Poprawe, R. , Esteves-Oliveira, M. , Fischer, H.:
Glass-ceramic coating material for the CO2 laser based sintering of thin films as caries and erosion protection.
DENTAL MATERIALS 33, 995-1003 (2017)
http://dx.doi.org/10.1016/j.dental.2017.06.008

Buling, A., Sändker, H., Stollenwerk, J., Krupp, U., Hamann-Steinmeier, A.:
Laser Surface Pretreatment of 100Cr6 Bearing Steel - Hardening Effects and White Etching Zones.
APPLIED SURFACE SCIENCE 378, 564-571 (2016)
https://doi.org/10.1016/j.apsusc.2016.03.088

Sändker, H., Stollenwerk, J., Hofmann, J., Loosen, P.:
Laser beam propagation and energy deposition in particulate PEEK layers.
Proceedings of World of Photonics. WLT/ LiM Lasers in Manufacturing, München, 22.06.-25.06.2015 1-9 (2015)

Lott, P., Stollenwerk, J., Wissenbach, K.:
Laser-based production of carbon fibers.
Proceedings 33rd ICALEO International Congress on Applications of Lasers & Electro–Optics, October 19-23, 2014, San Diego, CA, USA. Paper M 602, (6 S.) (2014)
https://doi.org/10.2351/1.4906476

Chen, X., Yagi, M., Akiyama, Y., Machida, O., Ohta, E., Meixner, M.: Stollenwerk, J., Boettger, U., Schneller, T.:
Fabrication of multilayer Pb(Zr0.53Ti0.47)O3 film crystallized by laser annealing.
Japanese Journal of Applied Physics 52 (4), (S.9) (2013)
https://doi.org/10.7567/JJAP.52.09KA06

Hartmann, C., Hambach, N., Jüngst, M., Keller, S., Holtkamp, J., Gillner, A.:
High density perforation of thin Al-foils with ultra short pulse lasers
Proc. of LAMP2013 - the 6th Int. Congr. on Laser Advanced Materials Processing (4 S.) (2013)
Journal of Lasers Micro/NanoEngineering 8(3), 266-270, (2013)
https://doi.org/10.2961/jlmn.2013.03.0013

Hawelka, D., Stollenwerk, J., Pirch, N., Wissenbach, K., Loosen, P.:
Improving surface properties by laser-based drying, gelation, and densification of printed sol-gel coatings.
Journal of Coatings Technology and Research 10, (8 S.) (2013)
https://doi.org/10.1007/s11998-013-9516-0

Stollenwerk, J.:
Energie- und ressourceneffiziente Funktionalisierung temperaturempfindlicher Substrate
Laser Mag. 2013, 8-9 (2013)

Hawelka, D., Stollenwerk, J., Pirch, N., Wissenbach, K.:
Improving Surface Properties by Laser-based Drying, Gelation and Densification of Printed Sol-Gel Coatings
Proc. 16th International Coating Science and Technology Symposium, September 9-12 2012, Midtown Atlanta, GA, 187-190 (2012)

Meixner, M., Stollenwerk, J., Wissenbach, K.:
Production of silver conductive paths by laser processing.
ICALEO: 31. Int. Congress on Applications of Lasers and Electro- Optics, September 23-27, 2012. International Congress on Applications of Lasers & Electro–Optics,  Anaheim, CA, USA, (5 S.) (2012)
https://doi.org/10.2351/1.5062476

Vedder, C., Stollenwerk, J., Wissenbach, K.:
Process monitoring and control for laser-based thin film treatment.
ICALEO: 31. Int. Congress on Applications of Lasers and Electro- Optics, September 23-27, 2012. International Congress on Applications of Lasers & Electro–Optics, Anaheim, CA, USA, (7 S.) (2012)
https://doi.org/10.2351/1.5062444

Hawelka, D., Stollenwerk, J., Pirch, N., Büsing, L., Wissenbach, K.:
Laser based inline production of wear protection coating on temperature sensitive substrates.
Physics Procedia 12, 490-498 (2011)
https://doi.org/10.1016/j.phpro.2011.03.060 (Open Access)

Vedder, C., Stollenwerk, J., Pirch, N., Wissenbach, K.:
Laser-based manufacturing of metallic conducting paths.
ICALEO 30. Int. Congr. on Applications of Lasers and Electro-Optics, October 23-27, 2011. M804, (5 S.) (2011)

Vedder, C., Stollenwerk, J., Wissenbach, K., Pirch, N.:
Laser-based production of metallic conducting paths.
Phys. Proced. 12, 252-260, (2011)
https://doi.org/10.1016/j.phpro.2011.03.131

Ganser, D., Gottmann, J., Mackens, U., Weichmann, U.:
Pulsed laser deposition of fluoride glass thin films
Appl. Surface Sci. 257, 954-959, (2010)
https://doi.org/10.1016/j.apsusc.2010.07.100

Gasser, A., Meiners, W., Weisheit, A., Willenborg, E., Stollenwerk, J., Wissenbach, K.:
Maßgeschneiderte Oberflächen und Bauteile. Teil 1.
Laser Technik Journal 7 (4), 47-53 (2010)
https://doi.org/10.1002/latj.201090061

Gasser, A., Meiners, W., Weisheit, A., Willenborg, E., Stollenwerk, J., Wissenbach, K.:
Maßgeschneiderte Oberflächen und Bauteile. Teil 2.
Laser Technik Journal 7(6), 22-26 (2010)
https://doi.org/10.1002/latj.201090087

Hawelka, D., Stollenwerk, J., Pirch, N., Wissenbach, K.:
Laser based production of thin wear protection films
ICALEO 2010. 29th International Congress on Applications of Lasers & Electro Optics, Anaheim/Ca., September 26-30, 2010. Paper 1709 (6 S.) (2010)
https://doi.org/10.2351/1.5062088

Trusheim, D., Schulz-Ruhtenberg, M., Hernandez, J. L., Uruena, A., Krantz, S., Morilla, C., Sarnet, T., Olowinsky, A.:
Damage-less laser ablation of thin films for silicon solar cells
Proc. of the 5th Int. WLT-Conf. on Lasers in Manufacturing 2009, Munich, June 15-18, 2009. Ed. by A. Ostendorf [u.a.], Stuttgart: AT Fachverl. (5 S.) (2009)

Vedder, C., Stollenwerk, J., Pirch, N., Wissenbach, K.:
Production technology for transparent and conducting nano layers
Proc. of the 27th Int. Conf. on Applications of Lasers and Electro-Optics 2008, ICALEO, Temecula/CA. October 20th-23rd, Paper N303, (5 S.) (2008)
https://doi.org/10.2351/1.5061416