Laser-based silicon crystallization for monolithic integration
in MEMS sensors

Press Release /

Micro-electromechanical systems (MEMS) have proven themselves a billion times over as sensors in smart cars, cell phones and mini insulin pumps, among other things. To make these MEMS even more powerful in the future, researchers at the Fraunhofer Institute for Laser Technology ILT in Aachen have developed a CMOS-compatible deposition and laser crystallization process in collaboration with the Fraunhofer ISIT and IST. In contrast to other common processes, this new process eliminates the need for wires and solder joints, an advantage that can significantly reduce the component size and enhance the sensor performance.