Plasma Technology

Our range of services

Plasma technology is nowadays established in many industrial sectors. Fraunhofer ILT is researching and using it to provide intensive sources of short-wave radiation in the extreme ultraviolet and soft X-ray range, to build compact UV radiation sources for metrology and to develop systems for sorting metal scrap on the basis of plasma spectroscopy. Moreover, the institute is developing plasma technology to purify waste water and exhaust gases in environmental technology.

Dense, hot plasmas are of interest, for example, as light sources with wavelengths in the EUV range (extreme ultraviolet). In such sources the plasma is generated by a pulsed discharge of electrically stored energy. The focus of research here is, among other things, on discharge concepts in which plasmas can be generated with a repetition rate in the range of several kilohertz at higher average radiant power and with long-term stability.

Radiation plasmas in the spectral range of the EUV can be used in microscopy or structuring on the nanometer scale, such as mask inspection in semiconductor production, in the characterization of optics, contamination studies or development of new photoresists. In environmental technology, for example, Fraunhofer ILT is developing processes for wastewater treatment that use a combination of plasma and UV treatment to break down pollutants.

Fraunhofer ILT’s services range from feasibility studies for customer-specific tasks, to the development of new processes, components and equipment all the way to fully automated systems and individual consulting.

Side view of a single filament barrier discharge.
© Fraunhofer ILT, Aachen, Germany.
Side view of a single filament barrier discharge.
Coaxial reactor with barrier discharge.
© Fraunhofer ILT, Aachen, Germany.
Coaxial reactor with barrier discharge.
Laser-Induced Breakdown Spectroscopy LIBS on a piece of scrap on a conveyor belt.
© Fraunhofer ILT, Aachen, Germany.
Laser-Induced Breakdown Spectroscopy LIBS on a piece of scrap on a conveyor belt.

Power electronics and pulsed power technology

  • Pulsed power systems up to 100 kW output
  • Generators for pulsed currents up to 100 kA
  • Capacitor chargers and power supplies
  • Regenerative electrodes for high, pulsed currents
  • High voltage and high current diagnostics

Fast data acquisition and processing

  • Data acquisition and control of pulsed systems
  • Real-time data processing
  • Design and construction of fast electronics

Plasma generation and diagnostics

  • Gas-discharge and laser-induced plasmas
  • Spectroscopy from the IR range to soft and hard X-rays
  • Determination of radiant fluxes
  • Determination of plasma parameters
  • High Speed Photography
  • Modeling of plasmas


Laser technology can solve demanding tasks in many different industries. Whether as a tool in automotive production, as measuring equipment in the environmental sector, as a diagnostic or therapeutic instrument in medical technology or as a communication medium in space technology, the laser provides multiple uses with high productivity and high efficiency.

Read up about the innovations of the Fraunhofer ILT in a few selected industries and convince yourself!


Research with us!

Please do not hesitate to contact us if you have any questions about general topics! Our contact persons are happy to get in touch with you.

Our services cover a wide range of topics. Related topics and further research and development projects can be found under the following links.