Fraunhofer Institute for Laser Technology ILT
Laser Measurement Technology and EUV Technology#
The focus of the technology field Laser Measurement Technology and EUV Technology lies in manufacturing measurement technology, materials analysis, identification and analysis technology in the areas of recycling and raw materials, measurement and test engineering for environment and security, as well as the use of EUV technology. In the area of manufacturing measurement technology, processes and systems are being developed for inline measurement of physical and chemical parameters in a process line. Quickly and precisely, distances, thicknesses, profiles or chemical composition of raw materials, semi-finished goods or products can be measured.
In the field of material analytics, the institute has acquired profound know-how in spectroscopic measurement processes. Applications are automatic quality control and positive material identification, monitoring of process parameters or online analysis of exhaust gases, dust and wastewater. The more precise the chemical characterization of recycling products, the higher their recycling value. Laser emission spectroscopy has proven itself as an especially reliable measurement tool. In addition to the development of processes, complete prototype plants and mobile systems for industrial use are produced.
In EUV technology, Fraunhofer's experts develop beam sources for lithography, microscopy, nanostructuring or x-ray microscopy. Optical systems for applications in EUV engineering are calculated, constructed and manufactured as well.