Fraunhofer Institute for Laser Technology ILTSave the Date!
Event details
Location
Online
Date
October 23, 2021 - October 28, 2021
Language
English
Our Talks
Please note: All times are shown in Central Daylight Time (GMT-5).
Wednesday, October 27, 2021 – Area: Metrology Sources
9:30 a.m. – 9:45 a.m. (CDT), Session #5
Irradiation systems for accelerated testing of EUVL components (Paper #S64)
Dr. Jochen Vieker, Fraunhofer ILT, Aachen (D)
Thursday, October 28, 2021 – Area: Applications Lasers, HHG
10:20 a.m. – 10:35 a.m. (CDT), Session #8
Compact EUV spectrometry tool for thin film and nanograting characterization (Paper #S52)
Dr. Sascha Brose, RWTH Aachen University – TOS, Aachen (D)