Micro Structuring

Our Service

Since pulsed, especially ultrashort pulsed laser radiation introduces little heat into the workpiece and has such high beam quality, it is commonly used to produce high-precision functional micro- and nanostructures. This particularly gentle type of subtractive laser material processing can be used for processes such as structuring, ablation, drilling, cutting or selective thin-film removal. These processes can be applied in various sectors such as aerospace, automotive, precision mechanics, electronics, display technology, the consumer market as well as medical and energy technology. For users in these fields, Fraunhofer ILT is an application-oriented development partner that develops new processes, processes and system technology for specific customer requirements.

Thanks to developments in recent years, ultra-short pulse lasers now have average powers in the multi-hundred watt range. To efficiently convert this high power into ablation processes and thus to increase process productivity, new approaches are required in which the laser beam is either split into several sub-beams or deflected at high speed. For example, parallelized multi-beam machining can be achieved at high precision with diffractive optical elements. Thus, for applications in filter and screen technology or for coating masks, such processes can drill holes at rates of up to 10,000 holes/s and sub-micron precision. In addition to the parallelization of processes, tailor-made beamforming concepts have been developed that are required, in particular, to efficiently process dielectric materials such as glass, sapphire and other difficult-to-process materials such as ceramics, semiconductors and heterogeneous layer systems.

The range of services offered by Fraunhofer ILT covers the entire value creation chain from process development through the design and implementation of new system components all the way to the construction of system concepts for the specific customer requirements. Services include near-market R&D services on micro- and nanostructuring, market and feasibility studies, design and simulation support, and comprehensive consulting.

Microstructured metal surface.
© Fraunhofer ILT, Aachen, Germany.
Microstructured metal surface.
Ablation of thin glass.
© Fraunhofer ILT, Aachen, Germany.
Ablation of thin glass.
Arrangement of micro holes in thin glass.
© Fraunhofer ILT, Aachen, Germany.
Arrangement of micro holes in thin glass.

Laser Ablation

  • Fabrication of tools and tool inserts
  • Fabrication of functional surfaces for modification of the wetting behavior, friction and optical properties
  • Selective ablation of thin films
  • Structure sizes < 10 μm with surface qualities < 200 nm

Laser Fine Cutting

  • High-speed cutting with cutting kerfs < 20 µm
  • Remote fine cutting
  • 3D applications

Nano Structuring

  • Fabrication of periodic surface structures by laser interference technologies
  • Structure sizes from 100 nm - 500 nm

Laser Drilling

  • Precision drilling with Æ > 30 μm at drilling depths up to 2 mm
  • High speed drilling of up to 5,000 holes/s
  • Micro drilling with diameters < 1 µm

Hybrid Processes for Micro Structuring

  • In-process laser heating for modification of the material properties
  • Fabrication of micro and nano structures by laser-assisted hot embossing


Our brochures offer a quick view onto the service portfolio “Micro Structuring“. Find more detailed information in the “project results“ tab.


“Micro and Nano Structuring with Lasers”


“Laser Processes for Hydrogen Technology”


“Laser Drilling”


"Laser Ablation for Thin Film Structuring"


“Laser Processes for the Efficient Production of Energy Storage Systems”


“Micro Joining with Laser Radiation”


“Laser-Based Contacting of Batteries and Power Electronics”


“Lasers in Plastics Technology”

“Laser Technology in Photovoltaics”

“Application Center Laser Structuring for Tool and Mold Construction”


Here you will find more detailed information on processes, components and systems developed by our scientists in the range of products and services on “Micro Structuring“.


Laser technology can solve demanding tasks in many different industries. Whether as a tool in automotive production, as measuring equipment in the environmental sector, as a diagnostic or therapeutic instrument in medical technology or as a communication medium in space technology, the laser provides multiple uses with high productivity and high efficiency.

Read up about the innovations of the Fraunhofer ILT in a few selected industries and convince yourself!


Blattmann, V., Trusheim, D.:
Hybrid laser-etching-process for wafer texturing
Energy Procedia 77, 766-773 (2015)

Finger, J., Kalupka C., Reininghaus, M.:
High power ultra-short pulse laser ablation of IN718 using high repetition rates
J. Materials Processing Technol. 226 (Dec.), 221-227 (2015)

Fornaroli, C., Holtkamp, J., Gillner, A.:
Dicing of thin silicon wafers with ultra-short pulsed lasers in the range from 200 fs up to 10 ps
J. Laser Micro/Nanoeng. 10 (2), 229-233 (2015)

Oreshkin, O., Küpper, M., Temmler, A., Willenborg, E.:
Active reduction of waviness through processing with modulated laser power
Journal of Laser Applications 27 (2), 22004 (7 S.) (2015)

Mincuzzi, G., Vesce, L., Schulz-Ruhtenberg, M., Gehlen, E., Reale, A., Di Carlo, A., Brown, T. M.:
Taking temperature processing out of dye-sensitized solar cell fabrication: Fully laser-manufactured devices
Adv. Energy Mat. 4, 1400421 (8 S.) (2014)

Temmler, A., Walochnik, M. A., Willenborg, E., Wissenbach, K.:
Surface structuring by remelting of titanium alloy TI6AL4V
In: Proceedings 33rd ICALEO International Congress on Applications of Lasers & Electro–Optics, October 19-23, 2014, San Diego, CA, USA
Paper ID 1401, ISBN 9781940168029 (10 S.) (2014)

Zibner, F., Ryll, J., Holtkamp, J., Gillner, A.:
High precision 2.5D laser cutting of thin nitinol and polyurethane for medical applications
ICALEO, 32th International Congress on Applications of Lasers&  Electro-Optics : October 6-10, 2013, Miama/Fl., USA., M4154 (6 S.) (2013)

Eppelt, Urs:
Elektronenschauer im Glas
Laser Community, 2/2012, pp. 24-25 (2012)

Eppelt, U., Russ, S., Hartmann, C., Sun, M., Siebert, C., Schulz, W.:
Diagnostic and Simulation of PS-Laser Cutting
Proc. of the 31st Int. Congress on Applications of Lasers & Electro-Optics, ICALEO September 23-27, 2012, Anaheim, CA, USA, Paper M504, 10 S. (2012)

Hambach, N., Hartmann, C., Holtkamp, J., Gillner, A.:
Stability limits of laser drilled hole arrays on large areas
J. Laser Appl. 24, Nr. 3, 5 S., (2012)

Michaeli, W., Eilbracht, S., Scharf, M., Hartmann, C., Bobzin, K., Bagcivan, N., Theiß, S.:
Application of variothermal heating concepts for the production of microstructured films using the extrusion embossing process
J. Polymer Eng. 32, 95-101 (2012)

Mincuzzi, G., Schulz-Ruhtenberg, M., Vesce, L., Reale, A., Di Carlo, A., Gillner, A., Brown, T.:
Laser processing of TiO2 films for dye solar cells: a thermal, sintering, throughput and embodied energy investigation
Progress in Photovoltaics: Research and Applications
Wiley Online Library DOI: 10.1002/pip.2261

Mincuzzi, G., Zardetto, V., Vesce, L., Schulz-Ruhtenberg, M., Gillner, A., Reale, A., di Carlo, A., Brown, T.:
Raster scanning laser and UV processing of nanocrystalline TiO2 films for sintering in dye solar cells: Device performance, throughput and embodied energy
MRS Online Proceedings Library 1447, 6 S. (2012)

Schaefer, M., Schulz-Ruhtenberg, M., Holtkamp, J., Gillner, A,:
Comparison of laser ablation of transparent conductive materials on flexible and rigid substrates
Proc. LOPE-C, Munich, 39-43 (2012)

Sun, M., Eppelt, U., Russe, S., Hartmann, C., Siebert, C., Zhua, J., Schulz:
Laser ablation mechanism of transparent dielectrics with picosecond laser pulses
Proc. SPIE 8530, 9 S. (2012)

Wu, S., Huang, J., Beckemper, S., Gillner, A., Wang, K., Bubeck, C.:
Block polymer supramolecular assemblies hierarchically structured by three-beam interference laser ablation
J. Mat. Chem. 22, Nr. 11, 4989-4995 (2012)

Beckemper, S., Huang, J., Gillner, A., Wang, K.:
Generation of periodic micro- and nano-structures by parameter-controlled three-beam laser interference technique
J. Laser Micro/Nanoeng. 6, Nr. 1, 49-53, (2011)

Bobzin, K., Bagcivan, N., Gillner, A., Hartmann, C., Holtkamp, J., Michaeli, W., Klaiber, F., Schöngart, M., Theiß, S.:
Injection molding of products with functional surfaces by micro-structured, PVD coated injection molds
Prod. Eng. 5, Nr. 4, 415-422, (2011)

Bobzin, K., Bagcivan, N., Theiß, S., Hartmann, C., Holtkamp, J., Gillner, A., Michaeli, W., Hopmann, C., Eilbracht, S., Schöngart, M., Scharf, M.:
Manufacturing of micro-structured parts for mass production purposes
Proc. of the Int. Symp. on Assembly and Manufacturing ISAM 2011, 25.5.-27.5. 2011, Tampere, Finland. 8 S. ISBN 978-1-61284-343-8 (digital)

Bobzin, K., Bagcivan, N., Ewering, M., Gillner, A., Beckemper, S., Hartmann, C., Theiß, S.:
Nano structured physical vapor deposited coatings by means of picosecond laser radiation
J. Nanosci. Nanotechnol. 11, 1-7, (2011)

Bobzin, K., Bührig-Polaczek, A., Michaeli, W., Poprawe, R., Bagcivan, N., Beckemper, S., Eilbracht, S., Gillner, A., Hartmann, C., Holtkamp, J., Ivanov, T., Klaiber, F., Scharf, M., Schöngart, M., Theiß, S.:
Verkürzung von Prozessketten zur Herstellung von Bauteilen mit funktionalen Oberflächen mit Mikro-und Nanostrukturen
In: Brecher, C. (Hrsg.): Integrative Produktionstechnik für Hochlohnländer, 672-734, (2011)

Hambach, N., Hartmann, C., Holtkamp, J., Gillner, A.:
Stability limits of laser drilled hole arrays on large areas.
ICALEO. 30. Int. Congr. on Applications of Lasers and Electro-Optics, October 23-27, 2011. M50, 895-899, 2011Holtkamp, J., Hartmann, C., Gillner, A., Beckemper, S., Dohrn, A., Eifel, S.:
Mikrostrukturieren mit Zukunft
Laser Technik J. 8, Nr 2, 37-40, (2011)

Ivanov, T., Bührig-Polaczek, A., Vroomen, U., Hartmann, C., Holtkamp, J., Gillner, A., Bobzin, K., Bagcivan, N., Theiss, S.:
Investment casting of surfaces with microholes and their possible applications
Light Metals 2011. Proc. of the technical sessions presented by the TMS Aluminum Committee at the TMS 2011 Annual Meeting & Exhibition. Warrendale, Pe.: TMS, Minerals, Metals & Materials Society. Chichester: Wiley, 705-709, (2011)

Ivanov, T., Bührig-Polaczek, A., Vroomen, U., Hartmann, C., Holtkamp, J., Gillner, A., Bobzin, K., Bagcivan, N., Theiss, S.:
Replication of specifially microstructured surfaces in A356-alloy via lost wax investment casting
J. Micromech. Microeng. 21, 85026-85026, (2011)

Michaeli, W., Schöngart, M., Klaiber, F., Beckemper, S.:
Production of superhydrophobic surfaces using a one-step variothermal injection moulding process
Micro Nanosystems 3, 222-225, (2011)

Schaefer, M., Holtkamp, J., Gillner, A.:
Ablation of PEDOT/PSS with excimer lasers for micro structuring of organic electronic devices
Synth. Met. 161, 1051-1057, (2011)

Schaefer, M., Esser, A., Holtkamp, J., Gillner, A.:
Laser ablation of transparent conducting materials for organic electronics
Proc. of Large-Area, Organic and Polymer Electronics Convention 2011 (LOPE-C 11), June 2011, Frankfurt/M. Frankfurt/M.: Organics Electronics Association, 159-163, (2011)

Schulz-Ruhtenberg, M., Trusheim, D., Das, J., Krantz, S., Wieduwilt, J:
Influence of pulse duration in picosecond laser ablation of silicon nitride layers
Energy Proced. 8, 614-619, (2011)

Schulz-Ruhtenberg, M., Häberle, A., Russell, A., Hernández, J. L., Krantz, S.:
Influence of the pulse width for visible pulsed laser doping for crystalline solar cells using phosphosilicate glass
J. Laser Micro/Nanoeng. 6, Nr. 1, 64-68, (2011)

Sedao, X., Sarnet, T., Hernandez, J. L., Schulz-Ruhtenberg, M., Krantz, S.:
Edge isolation using ultra-short pulse laser materials with a top-hat beam profile
Adv. Mat. Res. 321, 234-239, (2011)

Trusheim, D., Schulz-Ruhtenberg, M., Baier, T., Krantz, S., Bauer, D., Das, J.:
Investigation of the influence of pulse duration in laser processes for solar cells
Phys. Proc.12, 278-285, (2011)

Gillner, A.
Laser micro-structuring
In: YI Qin: Micromanufacturing Engineering and Technology, Norwich, N.Y.: W. Andrew Publ. 2010. pp. 59-67. ISBN 978-0-8155-1545-6

Huang, J., Wu, S., Beckemper, Gillner, A.
All-optical fabrications of ellipsoidal caps on azobenzene functional polymers
Opt. Lett. 35, Nr 16. 2711-2713, (2010)

Schaefer, M., Jacobs, P., Bauer, D., Moll, D., Gillner, A.
Investigation and development of a molding process for the production of micro-hairs
Int. J. Adv. Manuf. Technol. 51, 935-944, (2010)

Schulz-Ruhtenberg, M., Haeberle, A., Russell, R., Hernández, J. L., Krantz, S.
Quest for the ideal laser for an industrial laser doping process for crystalline solar cells
LPM 2010 - 11th International Symposium on Laser Precision Microfabrication, Stuttgart, 5 S., (2010)

M. Schulz-Ruhtenberg, J. L. Hernandez, V. Prajapati, R. Bleidiessel, C. Morilla, Y. Larmanda, V. Vervisch, T. Sarnet, A. Olowinsky
Direct laser doping for high-efficiency solar cells
ICALEO 2009, 28th International Congress on Applications of Lasers & Electro-Optics, 4 S., (2009)

A. Temmler, E. Willenborg, N. Pirch, K. Wissenbach
Structuring by remelting
Proc. of the 5th Int. WLT Conf. on Lasers in Manufacturing 2009, Munich, June 15th - 18th, 2009. Ed. by A. Ostendorf [u.a.]
Stuttgart: AT-Fachverlag, pp. 403-407, (2009)

R. Poprawe, A. Gillner, D. Hoffmann, J. Gottmann, W. Wawers, W. Schulz
High speed high precision ablation from ms to fs
Proc. SPIE 7005, 12 S., (2008)

A. Gillner
Laser micro processing
Laser Technik J. 5, 27-30, (2008)

D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle
Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching
Opt. Expr. 16, Nr 3, 1517-1522, (2008)


Our services cover a wide range of topics. Related topics to Micro Structuring and further research and development focuses can be found under the following links.