Nano Structuring

Products and Services Nano Structuring

Nano Structuring

  • Production of deterministic periodic surface structures by multi-beam interference
  • Production of statistical periodic surface structures by laser-induced surface effects (LIPSS, nano ripples)
  • Structure sizes in the range of 100 nm - 500 nm


Steger, M., Hartmann, C., Beckemper, S., Holtkamp, J., Gillner, A.:
Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
Proc. of LAMP2013 - the 6th International Congress on Laser Advanced Materials Processing. 6 S. (2013)

Freiberger, R., Hauck, J., Reininghaus, M., Wortmann, D., Juschkin, L.:
Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation.
Proc. SPIE 8076, 80760K, 7 S., 2011

Ivanov, D. S. , Shultz (Schulz), W.:
MD-based modeling of swift heavy ion beam nanostructuring of dielectrics.
8th EBSA European Biophysics Congress, August 23rd-27th 2011, Budapest, Hungary. Eur. Biophys. J. 40 (Suppl. 1), P-266, p.107, 2011

Huang, J., Beckemper, S., Gillner, A., Wang, K.
Tunable surface texturing by polarization-controlled three-beam interference
J. Micromech. Microeng. 20, 95004 (6 S.)

J. Gottmann, D. Wortmann, N. Brandt
Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing
Proc. SPIE
6879, 12 S. 2008

D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle
Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching
Opt. Expr.
16, Nr 3, 1517-1522, 2008