Nano Structuring

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Ultrashort pulsed laser radiation can be used to produce precise nanostructures for functional surfaces. These high-precision, periodic surface structures can be selectively generated and manipulated by laser-induced surface effects or multi-beam interference.

The resulting nanostructures favor selective bacterial growth in biotechnology or the ingrowth behavior of ceramic implants in medical technology. Furthermore, multi-beam interference can be used to assemble complex security features from periodic surface structures with structure sizes in the range from 300 to 5000 nm and that have an individualized, characteristic spectral signature. These surface structures can be generated at surface rates of up to 60 cm²/min. In addition to the optical properties, the haptic and adhesive properties of components can be manipulated and adapted. Not only can these structures be used in medical technology and biotechnology, but they can also be applied in tool and mold making, the automotive, the aerospace and the electronics industries as well as in energy technology.

Fraunhofer ILT develops processes and builds system-technology components for the application-specific structuring of surfaces of different materials. The range of services includes market-oriented R&D services for nanostructuring, market and feasibility studies, tasks in the areas of design and simulation as well as comprehensive consulting.

Point- and line-based surface structuring by multi-beam interference for large area processes with are rates of up to 60 cm²/min.
© Fraunhofer ILT, Aachen, Germany.
Point- and line-based surface structuring by multi-beam interference for large area processes with are rates of up to 60 cm²/min.
Surface structuring with variable multi-beam interference.
© Fraunhofer ILT, Aachen, Germany.
Surface structuring with variable multi-beam interference.
Micro- and nanostructures for functional surface structuring, e.g. shark-skin effect for drag reduction (upper left).
© Fraunhofer ILT, Aachen, Germany.
Micro- and nanostructures for functional surface structuring, e.g. shark-skin effect for drag reduction (upper left).

Nano Structuring

  • Production of deterministic periodic surface structures by multi-beam interference
  • Production of statistical periodic surface structures by laser-induced surface effects (LIPSS, nano ripples)
  • Structure sizes in the range of 100 nm - 500 nm


Our brochures and flyers offer a quick view onto the service portfolio “Nano Structuring“. Find more detailed information in the “project results“ tab.


Brochure “Application Center Laser Structuring for Tool and Mold Construction“


Brochure “Micro and Nano Structuring with Lasers“


Laser technology can solve demanding tasks in many different industries. Whether as a tool in automotive production, as measuring equipment in the environmental sector, as a diagnostic or therapeutic instrument in medical technology or as a communication medium in space technology, the laser provides multiple uses with high productivity and high efficiency.

Read up about the innovations of the Fraunhofer ILT in a few selected industries and convince yourself!


Lüttgenau, B., Brose, S., Choi, S., Panitzek, D., Danylyuk, S., Lebert, R., Stollenwerk, J., Loosen, P.:
Design and realization of an industrial stand-alone EUV resist qualification setup.
SPIE Photomask Technology + EUV Lithography, 2020, Online Only. Extreme Ultraviolet Lithography 2020 (Proc. SPIE 2020), 115171 , 115171F (12 S.),(2020)

Lange, K., Hördemann, C., Schulz‐Ruhtenberg, M., Caro, J.:
Porous Nickel Nano‐Foam by Femtosecond Laser Structuring for Supercapacitor Application.
ChemElectroChem 5(23), 3688-3694, (2018)

Großmann, D., Reininghaus, M., Kalupka, C., Jenne, M., Kumkar, M.:
In-situ microscopy of front and rear side ablation processes in alkali aluminosilicate glass using ultra short pulsed laser radiation.
OPTICS EXPRESS 25 (23), 28478- (11 S.) (2017)

Boehr, S., Nolis, P., Brenner, A., Reininghaus, M., Lamß, M., Müller, B.:
Laserbasierte Fertigungstechniken und additive Fertigung.
Galvanotechnik 108, 1672-1677 (6 S.) (2017)

Steger, M., Gillner, A.:
Analysis and Evaluation of Boundary Conditions for Direct Surface Structuring by Multi-Beam Interference.

Reininghaus, M., Ivanov, D., Maß, T.W.W., Eckert, S., Juschkin, L., Garcia, M. E., Taubner, T., Poprawe, R.:
Nanophotonic applications of fs-laser radiation induced nanostructures and their theoretical description
Optically Induced Nanostructures. Hrsg. v. König, Karsten / Ostendorf, Andreas. Berlin: De Gruyter, 25-46 (2015)

Steger, M., Hartmann, C., Beckemper, S., Holtkamp, J., Gillner, A.:
Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
Proc. of LAMP2013 - the 6th International Congress on Laser Advanced Materials Processing. (6 S.) (2013)

Freiberger, R., Hauck, J., Reininghaus, M., Wortmann, D., Juschkin, L.:
Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation. 
Proc. SPIE 8076, 80760K, (7 S.) (2011)

Ivanov, D. S. , Shultz (Schulz), W.:
MD-based modeling of swift heavy ion beam nanostructuring of dielectrics. 
8th EBSA European Biophysics Congress, August 23rd-27th 2011, Budapest, Hungary. Eur. Biophys. J. 40 (1), P-266, p.107, (2011)

Huang, J., Beckemper, S., Gillner, A., Wang, K.:
Tunable surface texturing by polarization-controlled three-beam interference
J. Micromech. Microeng. 20, 95004 (6 S.) (2010)

Gottmann, J., Wortmann, D., Brandt, N.:
Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing
Proc. SPIE 6879, (12 S). (2008)

Wortmann, D., Gottmann, J., Brandt, N., Horn-Solle, H.:
Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching
Opt. Expr.16 (3), 1517-1522, (2008)

Our services cover a wide range of topics. Related topics to Nano Structuring and further research and development focuses can be found under the following links.